Self-sacrificial surface micromachining using poly(methyl methacrylate)
نویسندگان
چکیده
منابع مشابه
Water-soluble sacrificial layers for surface micromachining.
This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or ...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2008
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/18/11/115012